This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
| ISBN: | 9783662488140 |
| Publication date: | 8th December 2015 |
| Author: | XiaoSheng Zhang |
| Publisher: | Springer an imprint of Springer Berlin Heidelberg |
| Format: | Hardback |
| Pagination: | 122 pages |
| Series: | Springer Theses |
| Genres: |
Electronics engineering Nanotechnology Energy, power generation, distribution and storage |
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting features in the following genres: Electronics engineering, Nanotechnology, Energy, power generation, distribution and storage
Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting is available in Hardback
Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting was written by XiaoSheng Zhang and published by Springer an imprint of Springer Berlin Heidelberg
Micro/nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting has 122 pages
Yes it is part of Springer Theses series