Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
| ISBN: | 9783642058042 |
| Publication date: | 4th December 2010 |
| Author: | Jarek Dabrowski, Eicke R Weber |
| Publisher: | Springer an imprint of Springer Berlin Heidelberg |
| Format: | Paperback |
| Pagination: | 490 pages |
| Series: | Springer Series in Materials Science |
| Genres: |
Nanotechnology Testing of materials Production and industrial engineering Mathematical physics Engineering: general |
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination.
Predictive Simulation of Semiconductor Processing features in the following genres: Nanotechnology, Testing of materials, Production and industrial engineering, Mathematical physics, Engineering: general
Paperback, Hardback. Not Available.
Predictive Simulation of Semiconductor Processing was written by Jarek Dabrowski, Eicke R Weber and published by Springer an imprint of Springer Berlin Heidelberg
Predictive Simulation of Semiconductor Processing has 490 pages
Yes it is part of Springer Series in Materials Science series