Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices
Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.
The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.
The book covers additional topics such as:
A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.
| ISBN: | 9781394229833 |
| Publication date: | 20th April 2025 |
| Author: | Sanket Goel |
| Publisher: | Wiley-IEEE Press an imprint of Wiley |
| Format: | Hardback |
| Pagination: | 208 pages |
| Series: | IEEE Press Series on Sensors |
| Genres: |
Electronics and communications engineering |
Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices
Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.
The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.
The book covers additional topics such as:
A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.
Micro Electromechanical Systems (MEMS) features in the following genres: Electronics and communications engineering
Micro Electromechanical Systems (MEMS) is available in Hardback
Micro Electromechanical Systems (MEMS) was written by Sanket Goel and published by Wiley-IEEE Press an imprint of Wiley
Micro Electromechanical Systems (MEMS) has 208 pages
Yes it is part of IEEE Press Series on Sensors series
£76.46