Diazonaphthoquinone-Based Resists by Ralph Dammel
| ISBN: | 9780819410191 |
| Publication date: | 31st December 1993 |
| Author: | Ralph Dammel |
| Publisher: | SPIE an imprint of SPIE Press |
| Format: | Paperback |
| Pagination: | 203 pages |
| Series: | Tutorial Texts in Optical Engineering |
| Genres: |
Applied optics |