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Laser Annealing Processes in Semiconductor Technology

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Laser Annealing Processes in Semiconductor Technology Synopsis

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

About This Edition

ISBN: 9780128202555
Publication date:
Author: Fuccio LAASCNRS Toulouse, France Cristiano
Publisher: Woodhead Publishing an imprint of Elsevier Science Publishing Co Inc
Format: Paperback
Pagination: 426 pages
Series: Woodhead Publishing Series in Electronic and Optical Materials
Genres: Materials science
Electronics engineering

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