Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for < 0.18 um process technology. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability. This volume will be an invaluable resource for professionals, scientists, researchers and graduate students involved in dielectric technology development, materials science, polymer science, and semiconductor devices and processing.
| ISBN: | 9783540678199 |
| Publication date: | 14th November 2002 |
| Author: | P S Ho, J Leu, Wei William Lee |
| Publisher: | Springer an imprint of Springer Berlin Heidelberg |
| Format: | Hardback |
| Pagination: | 309 pages |
| Series: | Springer Series in Advanced Microelectronics |
| Genres: |
Electronics engineering Engineering applications of electronic, magnetic, optical materials Testing of materials |