Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.
| ISBN: | 9780819495983 |
| Publication date: | 30th December 2000 |
| Author: | Prosenjit RaiChoudhury |
| Publisher: | SPIE an imprint of SPIE Press |
| Format: | Paperback |
| Pagination: | 528 pages |
| Series: | Press Monographs |
| Genres: |
Applied optics |
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component).
MEMS and MOEMS Technology and Applications features in the following genres: Applied optics
Paperback. Not Available.
MEMS and MOEMS Technology and Applications was written by Prosenjit RaiChoudhury and published by SPIE an imprint of SPIE Press
MEMS and MOEMS Technology and Applications has 528 pages
Yes it is part of Press Monographs series