Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.
| ISBN: | 9780819451668 |
| Publication date: | 28th February 2004 |
| Author: | F M Schellenberg |
| Publisher: | SPIE an imprint of SPIE Press |
| Format: | Hardback |
| Pagination: | 875 pages |
| Series: | SPIE Milestone Series |
| Genres: |
Applied optics |
Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing.
Selected Papers on Resolution Enhancement Techniques in Optical Lithography features in the following genres: Applied optics
Hardback. Not Available.
Selected Papers on Resolution Enhancement Techniques in Optical Lithography was written by F M Schellenberg and published by SPIE an imprint of SPIE Press
Selected Papers on Resolution Enhancement Techniques in Optical Lithography has 875 pages
Yes it is part of SPIE Milestone Series series