Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
| ISBN: | 9780819447791 |
| Publication date: | 31st January 2003 |
| Author: | John Yasaitis, Mary Ann PerezMaher, JeanMichel Karam, Society of Photooptical Instrumentation Engineers, Semiconductor Equipment and Materials International |
| Publisher: | SPIE |
| Format: | Paperback |
| Pagination: | 604 pages |
| Series: | SPIE Proceedings Series |
| Genres: |
Electronic devices and materials |