The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices.
Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field.
It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
| ISBN: | 9780819437167 |
| Publication date: | 31st July 2000 |
| Author: | P RaiChoudhury |
| Publisher: | SPIE an imprint of SPIE Press |
| Format: | Hardback |
| Pagination: | 520 pages |
| Series: | Press Monographs |
| Genres: |
Applied optics |
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate.
MEMS and MOEMS Technology and Applications features in the following genres: Applied optics
Hardback. Not Available.
MEMS and MOEMS Technology and Applications was written by P RaiChoudhury and published by SPIE an imprint of SPIE Press
MEMS and MOEMS Technology and Applications has 520 pages
Yes it is part of Press Monographs series