This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
| ISBN: | 9780819430526 |
| Publication date: | 31st May 1999 |
| Author: | Harry J Levinson |
| Publisher: | SPIE an imprint of SPIE Press |
| Format: | Paperback |
| Pagination: | 190 pages |
| Series: | Tutorial Texts in Optical Engineering |
| Genres: |
Photographic equipment and techniques: general Other manufacturing technologies Technology: general issues |