Glow Discharge Processes Sputtering and Plasma Etching

by Brian Chapman

Glow Discharge Processes Sputtering and Plasma Etching Synopsis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Book Information

ISBN: 9780471078289
Publication date: 5th November 1980
Author: Brian Chapman
Publisher: John Wiley & Sons Inc an imprint of John Wiley and Sons Ltd
Format: Hardback
Pagination: 432 pages
Categories: Electricity, electromagnetism & magnetism,

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