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Glow Discharge Processes Sputtering and Plasma Etching by Brian Chapman
  

Glow Discharge Processes Sputtering and Plasma Etching

Synopsis

Glow Discharge Processes Sputtering and Plasma Etching by Brian Chapman

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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Book Info

Publication date

25th September 1980

Author

Brian Chapman

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Publisher

John Wiley & Sons Inc an imprint of John Wiley and Sons Ltd

Format

Hardback
432 pages

Categories

Electricity, electromagnetism & magnetism

ISBN

9780471078289

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