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Micro Electro Mechanical Systems

by Qing-An Huang

Part of the Micro/Nano Technologies Series

Micro Electro Mechanical Systems Synopsis

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.

Book Information

ISBN: 9789811059445
Publication date: 4th May 2018
Author: Qing-An Huang
Publisher: Springer Verlag, Singapore
Format: Hardback
Pagination: 1479 pages
Categories: Precision instruments manufacture, Precision instruments manufacture, Electronics engineering, Microwave technology,

About Qing-An Huang

Prof. Zheng You is currently a professor in Department of Precision Instrument in Tsinghua University, Beijing, China. He is also served as the director of Micro-Nano Technology Research Center, Tsinghua University and State Key Laboratory of Precision Measurement Technology and Instruments. He has been elected as an Academician, Chinese Academy of Engineering since 2013. Prof. Zheng You's main research interests fall in micro-nano technology, MEMS, Satellite technology, and measurement and instruments. Prof. Xiaohao Wang is currently a professor in Department of Precision Instrument, Tsinghua University. He also serves as Associate Dean of Education and Director of the Division of Advanced Manufacturing, ...

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