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Characterization in Silicon Processing by Yale Strausser
  

Characterization in Silicon Processing

Part of the Materials Characterization Series Series

Synopsis

Characterization in Silicon Processing by Yale Strausser

With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: the essential processes of Silicon Epitaxial Growth; coverage of Polysilicon Conductors, Silicides, Aluminum and Copper-based Conductors, Tungsten-based Conductors; and concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy.

About the Author

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Book Info

Publication date

1st December 2009

Author

Yale Strausser

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Publisher

Momentum Press

Format

Hardback
240 pages

Categories

Industrial chemistry

ISBN

9781606501092

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