A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices
| ISBN: | 9781118717967 |
| Publication date: | 30th December 2016 |
| Author: | Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma |
| Publisher: | John Wiley & Sons Inc |
| Format: | Hardback |
| Pagination: | 352 pages |
| Genres: |
Engineering measurement and calibration Nanotechnology |