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Measurement Technology for Micro-Nanometer Devices

by Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma

Measurement Technology for Micro-Nanometer Devices Synopsis

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Book Information

ISBN: 9781118717967
Publication date: 26th October 2016
Author: Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma
Publisher: John Wiley & Sons Inc
Format: Hardback
Pagination: 344 pages
Categories: Engineering measurement & calibration, Nanotechnology,

About Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma

WENDONG ZHANG, North University of China, China XIUJIAN CHOU, North University of China, China TIELIN SHI, Huazhong University of Science and Technology, China ZONGMIN MA, North University of China, China HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China JING CHEN, Peking University, China LIGUO CHEN, Soochow University, China DACHAO LI, Tianjin University, China CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

More About Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma

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