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EUV Sources for Lithography by Vivek Bakshi

EUV Sources for Lithography

Part of the Press Monograph Series


EUV Sources for Lithography by Vivek Bakshi

This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.

About the Author

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Book Info

Publication date

30th November 2005


Vivek Bakshi

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SPIE Press


900 pages


Printing & reprographic technology
Applied optics



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