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Handbook of Microlithography, Micromachining, and Microfabrication

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Handbook of Microlithography, Micromachining, and Microfabrication Synopsis

Handbook of Microlithography, Micromachining, and Microfabrication by P. Rai-Choudhury

About This Edition

ISBN: 9780819423795
Publication date: 31st December 1997
Author: P. Rai-Choudhury
Publisher: SPIE Press
Format: Hardback
Pagination: 698 pages
Series: Press Monographs
Genres: Electronic devices and materials