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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel
  

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Part of the Nato Science Partnership Subseries: 3 Series

Synopsis

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

About the Author

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Book Info

Publication date

31st March 1998

Author

Eric Garfunkel

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Publisher

Springer

Format

Paperback
507 pages

Categories


ISBN

9780792350088

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