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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Part of the Nato Science Partnership Subseries: 3 Series


Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

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Book Info

Publication date

31st March 1998


Eric Garfunkel

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507 pages




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