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Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices, Towards an Atom by Eric Garfunkel
  

Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices, Towards an Atom

Part of the NATO Science Partnership Subseries: 3 Series

RRP £222.50

Synopsis

Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on SI-Based Devices, Towards an Atom by Eric Garfunkel

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

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Book Info

Publication date

28th February 1998

Author

Eric Garfunkel

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Publisher

Kluwer Academic Publishers

Format

Hardback
507 pages

Categories


ISBN

9780792350071

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