An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
ISBN: | 9780471546092 |
Publication date: | 8th November 1994 |
Author: | Simon M. (National Chiao Tung University, Hsinchu, Taiwan) Sze |
Publisher: | Wiley-Interscience an imprint of John Wiley & Sons Inc |
Format: | Hardback |
Pagination: | 576 pages |
Genres: |
Electronics: circuits and components Electronic devices and materials Condensed matter physics (liquid state and solid state physics) |