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Scaling Issues and Design of MEMS by Salvatore Baglio, Salvatore Castorina, Nicolo Savalli


Scaling Issues and Design of MEMS by Salvatore Baglio, Salvatore Castorina, Nicolo Savalli

This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including: * temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple;* mechanical sensors;* inductive microsensors for the detection of magnetic particles;* electrostatic, thermal and magnetic actuators. With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the importantissue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots. Scaling Issues and Design of MEMS aims to improve the reader's basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.

About the Author

Salvatore Baglio, Associate Professor of Electronic Instrumentations and Measurements, University of Catania, Italy. Salvatore Baglio has co-authored over 150 scientific publications and his research interests include nonlinear and chaotic dynamical systems, smart sensors, microsensors and Microsystems. Salvatore Castorina, Electrical and Electronic Measurements Group, University of Catania. Salvatore Castorina is co-author of over 20 scientific papers and his research interests include micro and nano electromechanical systems, magnetic and thermal, micro sensors and micro actuators, micro and nano robotics. Luigi Fortuna , Professor of System Theory, University of Catania. Luigi Fortuna has published more than 280 technical papers and his interests include nonlinear science and complexity, chaos and cellular neural networks. Nicolo Savalli, Engineering Faculty, University of Catania. Nicolo Savalli teaches courses in Measurement Theory and Measurement Applications and is co-author of more than 35 scientific publications. His research interests include micro-electro-mechanical-systems (MEMS) and micro-opto-electro-mechanical-systems (MOEMS).

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Book Info

Publication date

11th January 2008


Salvatore Baglio, Salvatore Castorina, Nicolo Savalli

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Wiley-Blackwell an imprint of John Wiley and Sons Ltd


244 pages


Electronics engineering



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