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Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma - Author

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Books by Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma

Measurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices

Author: Wendong Zhang, Xing Fu, Tiekin Shi, Zongmin Ma Format: Hardback Release Date: 26/10/2016

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices